Product Description:
Special gas conveying cabinet is designed for the supply of flammable and explosive, corrosive, toxic and other dangerous gas supply and supply system, according to the category can be divided into: fully automatic, semi-automatic and manual operation. The basic functions include automatic blowing, automatic switching and automatic safety cut-off in case of emergency (when the set alarm signal is triggered) The fully automatic gas cabinet realizes the safe and effective operation of the equipment by adopting the PLC control and touch screen as the man-machine interface, and by means of the equipment-installed pressure sensors, pneumatic valves, over-flow meters, etc. The internal PLC programmed with the safe and effective operation of the equipment is designed for the supply of hazardous gases such as flammable, explosive, corrosive and toxic. Its internal PLC programmed safety interlock function and the reasonable selection and layout of high purity valves not only satisfy the requirements of continuous supply of special gases and high purity in the production process of semiconductor process, but also ensure the normal production of the factory and personal safety of the employees.
Gases: Flammable, corrosive, toxic gases such as SiH4, NF3, NH3, N2O, HCI, etc.
Features:
Depending on the specific design of the customer's situation, the following safety equipment may be integrated into the gas cabinet:
① The gas cabinet has a self-closing door with mechanical lock.
② The gas cabinet is to be fitted with a sprinkler head, unless the water in the gas cabinet reacts with the gas inside the cabinet.
③ Trouble and shutdown alarms warn the operator by audible and visual alarms as well as the display on the controller screen. Among other things, the shutdown alarm closes the pneumatic valve and terminates the controller program.
④ An overflow switch is installed to alarm the operator in case of excessive gas flow downstream of the gas.
⑤ An exhaust monitor is installed to monitor whether the cabinet is adequately ventilated.
⑥ A diaphragm coupled pressure reducing valve is selected to automatically close the pressure reducing valve if the gas downstream pressure is higher than the pressure reducing valve set pressure because the diaphragm of the pressure reducing valve is mechanically coupled to the valve stem. Note that the pressure reducing valve seat may leak if it is damaged, corroded or contaminated.
⑦ A flow-restricting orifice fitting installed in the cylinder valve or cylinder connector greatly reduces the increase in gas flow caused when downstream equipment fails (supplied by the gas supplier).
⑧ For spontaneous combustion gas systems, a UV/infrared detector is required.
⑨ For flammable gas systems, a temperature switch is required.
⑩ Manual operation is disabled when a shutdown alarm occurs.
The emergency stop button is located on the controller panel.
Technical Parameters:
| Electricity requirements | AC 220V/50Hz 0.6KW |
| Auxiliary gas | pneumatic valve control pressure: 80 Psi ± 10 Psi (compressed air or pneumatic nitrogen); GN2 (vacuum operation): 90 Psi ± 10 Psi, PN2 (purge operation): 80 Psi ± 10 Psi |
| Operating ambient temperature | between 0°C and 35°C |
| Ambient humidity | non-condensing condition 0 ~ 80 |
| Equipment spray | water pressure: 3 ~ 4Bar |
| Water flow rate | 145LPM @ 2.1barg |
Applications:
Applicable industries: Semiconductor, TFT, Sun Solar, LED and other factories.
FAQ:
Q: What is a special gas cabinet?
Specialty gas cabinet is a kind of equipment for storing and delivering specialty gases, which is usually used in semiconductor, photovoltaic, electronic and other industries. It can safely manage and accurately control special gases to ensure the quality and supply stability of the gases.
Q: What types of special gas cabinets are available?
There are mainly manual, semi-automatic and fully automatic special gas cabinets.
Q: What should I pay attention to the installation of special gas cabinet?
The installation location should be chosen in a well-ventilated, dry place without fire source.
Ensure the stability of the equipment during installation, avoid tilting or shaking.
The connecting pipes should be made of materials that meet the requirements, and make sure that they are firmly connected and without leakage.
Q: How to use the special gas cabinet correctly?
Before using, you should read the operation manual of the equipment carefully to understand the performance and operation method of the equipment.
Conduct gas transportation and control according to the specified operation procedures to avoid misoperation.
Regularly check and maintain the equipment to ensure the normal operation of the equipment.
Q: How to ensure the safe operation of the special gas cabinet?
Install gas leakage detection devices to detect leakage and take measures in time.
Train operators to improve safety awareness and operation skills.
Regular safety inspection and maintenance of the equipment to ensure the safety performance of the equipment.
Q: What maintenance work is required for the special gas cabinet?
Regularly check the sealing of the equipment to ensure no leakage.
Clean the surface of the equipment to keep it clean and sanitary.
Check the wear and tear of valves, pipes and other parts, and replace damaged parts in time.
Q: What is the maintenance cycle of the special gas cabinet?
Maintenance cycle according to the frequency of use of the equipment and environmental conditions, generally recommended every six months to one year for a comprehensive maintenance.
Q: What should be done when the gas cabinet malfunctions?
First stop using the equipment and cut off the gas supply.
Check the fault phenomenon and determine the cause of the fault.
Take appropriate troubleshooting measures according to the cause of failure, such as replacing damaged parts, repairing electrical faults, etc.
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Specialty Gas Equipment is Commonly used in Semiconductor Photovoltaic Electronics Images
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